The small size and energy consumption of the sensor can achieve many new features, easy to mass and high-precision production, low cost of a single piece, easy to form a large-scale and multi-functional array, these features make them very suitable for automotive applications. Safe, comfortable, pollution-free, economy has always been the pursuit of the automotive industry and the goal. The key to achieving Sensor these goals is the electronic and intelligent car, the prerequisite is a timely access to a variety of information, which is bound to require a large number of vehicles in a variety of sensors. Traditional sensors tend to be bulky in size and weight, and their use in cars is subject to great limitations.

MEMS technology developed from semiconductor integrated circuit (IC) technology is becoming more and more mature. The use of this technology can produce a variety of sensitive and detect the amount of mechanical, magnetic, thermal, chemical and biomass micro-sensors, the sensor's small size and energy consumption, can achieve many new features to facilitate large quantities Temperature Sensor And high-precision production, a single piece of low cost, easy to form large-scale and multi-functional array, these features make them very suitable for automotive applications.

In the early 1980s, the micro-piezoresistive bulk pressure (ManifoldAbsolutePressure) sensor began mass production, replacing the early use of LVDT technology, pressure sensors. The mid-80s micro-accelerometer began to be used in automotive airbags, in the car is widely used in micro-sensors. However, the large-scale application of micro-sensors will not be limited to engine combustion control and airbags in the next 5 to 7 years, including engine operation Pressure Sensor and management, exhaust and air quality control, ABS (antilockbrakesystem, anti-lock system), vehicle dynamics control, Adaptive navigation, vehicle safety systems (such as airbags and obstacle detection and collision avoidance, etc.) will provide a broad market for MEMS technology.

The main areas of growth for automotive sensors include the following: accelerometers for vehicle dynamics control and airbags; pressure sensors for transmission, braking, cooling, tires, fuel, etc.; for vehicle dynamic control, rollover alarm And GPS back-up yaw rate sensors; position sensors for wheel speed and camshafts, crankshafts, pedal Throttle Position Sensor position sensitive; humidity sensors for vehicle environment monitoring; daylight, rain and humidity sensors; for close-range obstacle detection and avoidance Hit the distance sensor.

Automotive components need to meet a number of environmental, reliability and cost requirements. Specifically, they must be able to withstand a variety of high and low temperature, vibration, shock, moisture, corrosive atmosphere, electromagnetic interference and other unfavorable factors; on the other hand must also be suitable for mass production, generally to reach 100 per year More than a million, which is not only the demand for mass production, but also to recover the design and manufacturing aspects of the huge investment necessary. The vast majority of micro-sensors use silicon materials. It is well known that silicon materials are easy to obtain high purity, have good mechanical properties and are lighter in weight, have their own photoelectric effect, piezoresistive effect and Hall effect and other sensing characteristics, and easy to make signal sensitive and processing circuit integration sensor. Micro-sensor mainstream technology is silicon-based micro-machining process, which comes from the already mature semiconductor technology, can be processed Pressure Switch at the same time a large number of almost the same mechanical structure. Therefore, in addition to small size, light weight, low energy consumption advantages, the micro-sensor reliability is higher, the supply price can be much lower than the use of traditional mechanical and electrical technology and technology sensors

Due to the advantages of MEMS-based micro-sensors in reducing the cost of automotive electronics and improving their performance, they have begun to gradually replace sensors based on traditional electromechanical technology. The early multi-channel absolute pressure sensor has been replaced by a miniaturized sensor, and the sensor's sensor and signal processing circuits are now integrated on the same chip, greatly reducing the size and improving reliability and reducing interference The